This miniature mems spectrometer covers spectral regions where ingaas linear detector array technology lacks sensitivity and optical throughput. Mems micro electro mechanical systems uses integrated circuit fabrication techniques to make mechanical as well as electrical components on a single chip. Nasa goddard space flight center greenbelt, md 20771 donya. The mems technology group is part of the microdevices laboratory mdl at the jet propulsion laboratory jpl. Oct 26, 2000 the mems technology group is part of the microdevices laboratory mdl at the jet propulsion laboratory jpl. Herb shea entered the world of mems reliability when he joined the bell labs mems reliability group. C mems based 3d micropillar arrays were prepared by. Our group has demonstrated lamellar grating interferometer based ftir systems using mems. Pdf memsbased compact ftspectrometersa platform for. Conclusions and outlook the first approaches to build practically applicable compact spectrometers based on mems devices with large amplitude inplane actuators have exceeded initial expectations by far. Infrared waves have wavelengths longer than visible and shorter than microwaves, and have frequencies which are lower than visible and higher. Accessories and techniques for ftir sample analysis. The ftir measures the absorption of infrared ir radiation by a target material, which can be used for the detection and identification of gases, liquids, or solids. The second important issue is the feasibility to manufacture.
In this work we report, for the first time to the best of our knowledge, a bulkmicromachined wideband memsbased spectrometer covering both the nir and the mir ranges and working from 1200 nm to 4800 nm. From theory to the essentials of data manipulation, this course will appeal to all ftir users. Memsbased spectrometers for ultraminiature spaceborne. Charter street, madison wi 53706 b department of astronomy and astrophysics, ucsc, santa cruz ca 95064 abstract we describe a new concept for a memsbased active spatial filter for astronomical spectroscopy. These ir sources are characterized by a high radiation output. Miniaturized ftir spectrometer based on optical mems translatory actuator article pdf available in proceedings of spie the international society for optical engineering 6466 january 2007. An ftir spectrometer is composed of a broadband light source, an interferometer, and a detector fig. Highpower biofuel cells based on threedimensional reduced graphene oxidecarbon nanotube microarrays. Osa fourier transform infrared spectrometer based on an. Microelectromechanical systems mems and smaller nasa sbir. These micro nir sensors are the perfect solutions for demanding nir applications and. Miniaturized ftirspectrometer based on optical mems translatory actuator article pdf available in proceedings of spie the international society for optical engineering 6466 january 2007.
Highpower biofuel cells based on threedimensional reduced. Nasas ames research center, moffett field, ca, usa. Memfis mems lamellar grating interferometerbased ftir spectroscopy fourier transform infrared ftir spectroscopy is a widely used noncontact optical material characterization method with many applications, including chemical analysis of solids, fluids, gases, and process flows. Mems based microvalve technologies for microspacecraft propulsion juergen mueller jet propulsion laboratory the california institute of technology pasadena, ca 91 109 a survey and evaluation of mems based microvalves has been conducted to assess the. Together the multiplex and throughput advantages allow an ftir spectrometer to obtain a highquality infrared spectrum in a fraction of the time needed to get the. Space technology 6 nasa jet propulsion laboratory jpl. This twoday course will discuss ftir sample preparation for transmission and reflection methods of sample analysis. Miniaturized mems grating spectrometer motivation spectrometers are wellestablished tools for the qualitative and quantitative analysis of various substances. One common thread through current leading commercial mems. D jet propulsion laboratory, california institute of technology 4800 oak grove drive, ms 125152, pasadena, ca 91109 tel 818 354 7190, fax. Fourier transform infrared spectrometer ftir espo nasa. Ftir microscopy and imaging for failure analysis in. Micro electromechanical systems mems enable to drastically reduce the.
The group pursues the development of a wide range of advanced mems technologies that are primarily applicable to nasa s robotic as well as manned exploration missions. Both electrical and optical properties of the spectrometer are measured. Ir emitters often compete among users with special, inexpensive micro incandescent lamps. The fabrication process has been designed to allow the integration of such infrared emitters with an array of thermopile infrared detectors, with the aim of achieving an integrated nondispersive infrared microspectrometer. This threeyear project should result in an infrared gas sensoronachip integrating all the elements of a highend industrial gas and chemical sensor onto a single ic that can be. This means more energy reaches the detector, increasing the spectrums potential signaltonoise ratio. Microelectromechanical systems mems and smaller nasa. The application of the mems ftir in the environmental.
The mems spectrometers have different types such as fourier transform ft. Azosensors is the worlds leading online publication for the sensors community. Mems are a combination of tiny electrical and mechanical devices etched in silicon much like computer chips. Collaborating with ion optics will be nasas jet propulsion laboratory pasadena, ca, which developed the waferlevel technology enabling ir gas sensing. This paper presents a micro fourier transform infrared spectrometer. Although, it may also be sensible to use special ir emitters below 4. Microelectromechanical systems mems, also written as micro electromechanical systems or microelectronic and microelectromechanical systems and the related micromechatronics and microsystems is the technology of microscopic devices, particularly those with moving parts. The ncar fourier transform spectrometer will record highresolution solar infrared absorption spectra of the atmosphere above the dc8 aircraft. The ralphleisa infrared spectrometer on nasas new horizons spacecraft mapped compositions across plutos surface. First, the mems chip itself had to be laid out optimally for a spectrometer design. Compact highspeed spectrometers based on mems devices with.
Mems based compact ftspectrometers a platform for spectroscopic midinfrared sensors martin kraft, andreas kenda carinthian tech research ag villach, austria martin. Memsbased spectrometric sensor for the measurement of. The rapid scan mems michelson interferometer is the engine behind a miniaturized, fourier transform infrared ftir absorption spectrometer. It merges at the nanoscale into nanoelectromechanical systems nems. Six spectral filters are used to cover the region from 215 microns. They merge at the nanoscale into nanoelectromechanical systems nems and nanotechnology. The result is the first practically applicable prototype of a memsbased highspeed ft ir spectrometer operable under realworld conditions. Mems, as a technology, is expanding see figure 1, as indicated by a growing share in the commercial mems market predicted unit shipments of up to 189.
Fourier transform infrared spectroscopy ftir can provide fundamental information on the molecular structure of organic and inorganic components, and is one of the most versatile analytical techniques for the nondestructive, chemical characterization of geological samples, such as coal, shale, fluid and melt inclusions, silicate glass, minerals, and microfossils, e. Get the response of the ftir from ratio 5 black body ftir elliptic. Collaborating with ion optics will be nasa s jet propulsion laboratory pasadena, ca, which developed the waferlevel technology enabling ir gas sensing. Thus these technologies are ideally suited for the demanding requirements of space missions namely. The mems chips used in microhybrids infrared emitters consist of nanoamorphous carbon nac. Optical gas sensing based on mems ftir spectrometers 2017. Based on earlier published results2 and knowledge of the sample, this contaminant appears to represent solder mask on the pcb board. Applications of microfourier transform infrared spectroscopy. Highresolution miniature ftir spectrometer enabled by a. Silicon is stronger than stainless steel, has a thermal conductivity about half that. Novel micro electromechanical systems mems packaging for. Sep 23, 2019 highpower biofuel cells based on threedimensional reduced graphene oxidecarbon nanotube microarrays. The core engine of the spectrometer is a scanning michelson interferometer microfabricated using deep reactive ion etching drie technology.
Measure black body radiation at 1050c compare with theoretical curve get the response of the ftir from ratio 5 black body ftir elliptic mirror focusing lens. Summary instruments nasas mars exploration program. Interconnection and packaging issues of microelectromechanical systems mems and cots mems rajeshuni ramesham ph. A novel micromachined thermal infrared emitter using a heavily boron doped silicon slab as radiating element is presented. Help nasa sbirsttr program support for questions about the nasa sbirsttr solicitations, the proposal preparation and electronic submission process, and other program related areas, please contact the nasa sbirsttr program support office. The group pursues the development of a wide range of advanced mems technologies that are primarily applicable to nasas robotic as well as manned exploration missions. The series jsir350 sources are mems based infrared emitters.
The main element is a blazed microelectromechanical reflective grating device with an aperture of 3x3. Theory of infrared spectroscopy principles of fourier transform ftir introduction to sample analysis infrared analysis methods. From these absorption spectra column abundances of a number of stratospheric gases important to. Memfis mems lamellar grating interferometerbased ftir. Kuhlenb a astronomy department, university of wisconsin, madison, 475 n.
Abstract in the last few years several types of memsbased spectrometer systems emerged, mainly addressing the nir spectral range. Infrared waves have wavelengths longer than visible and shorter than microwaves, and have frequencies which are lower than visible and higher than microwaves. Box 217, 7500 ae enschede, the netherlands t abstract microtechnotogy enables the manufacturing of all kind of components for miniature systems or. The systems show the potential to be extremely fast and significantly cheaper than established spectrometers. Further investigation of the specific solder masks used in the manufacturing of this pcb board is warranted for a definitive identification. These lamps often feature a suitable level of radiation at wavelengths of up to approximately 4. Charter street, madison wi 53706 b department of astronomy and astrophysics, ucsc, santa cruz ca 95064 abstract we describe a new concept for a mems based active spatial filter for astronomical spectroscopy. Unlike many competing methods, they facilitate a noncontacting and nondestructive measurement by the use of electromagnetic radiation, whether the target is available in gaseous, liquid.
Compact highspeed spectrometers based on mems devices. Pdf miniaturized ftirspectrometer based on optical mems. The concept allows micromachined integration of all critical components of the system. Pdf titlecharacterization of mems ftir spectrometer microelectromechanical systems mems are the main driving technology that provides this miniaturization 910 11. Many of the examples in chapter 4 are based on the work of the bell labs mems team. Ftir, enabled by an hshaped electrothermal microelectromechanical systems mems mirror. A memsbased thermal infrared emitter for an integrated ndir. This paper presents the design and fabrication steps of a fully integrated spectrometer system based on attenuated total reflection. A special driving method was developed for obtaining a linear, uniformspeed motion of 186. The chemical and mineralogy instrument, or chemin for short, performs chemical analysis of powdered rock samples to identify the types and amounts of different minerals that are present. Mems technology at nasas jet propulsion laboratory deepdyve.
Mar 15, 2016 in this work we report, for the first time to the best of our knowledge, a bulkmicromachined wideband mems based spectrometer covering both the nir and the mir ranges and working from 1200 nm to 4800 nm. He very warmly thanks the entire bell labs lambdaroutertm team, and in particular dr. Design and fabrication steps for a memsbased infrared. Revolution of sensors in microelectromechanical systems. In this work we present the full characterization of an optical mems fourier transform infra red ftir spectrometer fabricated by deep reactive ion etching drie technology on silicon substrate.
The memsftir is a compact and low cost fourier transform infrared spectrometer, which can be carried easily with one hand. Mems based spectrometers for miniature remote remote sounders jerome bredin, neil macleod. A memsbased thermal infrared emitter for an integrated. Passivation chemistries must be developed to prevent premature. Asme biomems technology seminar pd 437 may 19, 2003 what are mems. Bergveld mesa research institute, university of twente p. In recent years other types of gyros have been used in spacecraft. Infrared spectrometer on nasas new horizons spacecraft. Redwavemicro nir spectrometer range 17502150nm the redwavemicro spectrometer is designed for oem and sensing applications in the nearinfrared spectral region. Optical gas sensing based on mems ftir spectrometers. Infrared radiation lies between the visible and microwave portions of the electromagnetic spectrum. The absorption of infrared solar radiation along a slant path to the sun is recorded from 2 to 15 micrometers. Thus, they are excellent for ndir gas analysis and are ideally suited for using with our pyroelectric or thermopile detectors. Thus these technologies are ideally suited for the demanding requirements of space missions namely, low mass, low.
Microelectromechanical systems mems, also written as micro electromechanical systems or microelectronic and microelectromechanical systems and the related micromechatronics and microsystems constitute the technology of microscopic devices, particularly those with moving parts. All the functions due for driving the ft ir excluding signal processing software are incorporated. The presented memsbased sensor prototype operates in the midir range between 2200 cm1 and 2500 cm1. The systems show the potential to be extremely fast. Actuators worldwide mems sensor and actuator markets % of market share, based on revenue source.
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